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CB5000 Series
When process reliability is a must, the CB5000 RF generator features our semiconductor production proven solid-state design to provide precise and repeatable power control, delivering ultra-stable and reliable RF power for your most mission-critical processes.
Features
5000 Watts
Small, lightweight packaging
Frequencies from 13.56 MHz to 60 MHz
Designed to meet ETL and SEMI F47 directives
LF class D\HF Class C or D amplifiers
Regulated Switch-mode DC Section
