CB5000 Series
When process reliability is a must, the CB5000 RF generator features our semiconductor production proven solid-state design to provide precise and repeatable power control, delivering ultra-stable and reliable RF power for your most mission-critical processes.
Features
- 5000 Watts
- Small, lightweight packaging
- Frequencies from 13.56 MHz to 60 MHz
- Designed to meet ETL and SEMI F47 directives
- LF class D\HF Class C or D amplifiers
- Regulated Switch-mode DC Section
Environmental Compliance
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