CB5000 Series

When process reliability is a must, the CB5000 RF generator features our semiconductor production proven solid-state design to provide precise and repeatable power control, delivering ultra-stable and reliable RF power for your most mission-critical processes. 


  • 5000 Watts
  • Small, lightweight packaging
  • Frequencies from 13.56 MHz to 60 MHz
  • Designed to meet ETL and SEMI F47 directives
  • LF class D\HF Class C or D amplifiers 
  • Regulated Switch-mode DC Section
Image Model Name Power Input Voltage Frequency Datasheet RFQ
CB5000 5kW 208 / 400 / 480 VAC (3-Phase) 13.56 to 60MHz Datasheet RFQ
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