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Low temperature coefficient with no partial discharges
E-beam lithography allows the creation of nanoscale patterns in semiconductor manufacturing and research applications. However, partial discharge and low stability at high voltages impact the performance of e-beam lithography tools which can lead to lost revenue for semiconductor manufacturers.
The stability, precision and performance needed in a power supply
Equipment damage due to short circuit and shielding issues is a problem for design engineers as it affects yield. To deliver the performance needed, e-beam tools require high voltage e-beam power supplies with high precision and a low temperature coefficient with no partial discharges.
Our integrated and customized high voltage e-beam power supplies provide the high voltage stability, low ripple and short circuit protection you need.
Output voltages 0-3.5kVDC to 0-12.5kVDC
3 phase AC input, 6U 19" rack mount
Manual voltage & current control with digital display
Digital, LAN & USB interface option
Analog programming/interface option
Continuous operation at full rated power
Short circuit & arc protection, integrated arc counter
Output voltages 0-150VDC to 0-3kVDC
For models up to 1.5kVDC: floating output
Autoranging characteristic with fixed power limit
Voltage & current control with 10 turn potentiometer
Control mode display with LEDs & power limit LED
Digital, LAN & USB interface option
Short circuit & arc protection
Output voltages 0-20kVDC to 0-300kVDC
Voltage & current setting via 10-turn potentiometers
Voltage & current regulation with automatic transition
Control modes indicated by LEDs
Unlimited operation at rated power
Safety interlock loop monitors
Short circuit & arc proof
Clean, tightly regulated output ensures consistent beam positioning for advanced lithography and research designs.
Partial discharges and voltage instability can compromise nanoscale patterning, causing yield loss and equipment issues.
XP Power’s high voltage e-beam power supplies deliver ultra-stable, low-ripple output with a low temperature coefficient, ensuring precise and reliable operation for critical semiconductor manufacturing and research applications.
Short circuits and shielding issues can damage sensitive e-beam equipment and reduce production yield.
XP Power’s e-beam sputtering power supplies provide integrated short circuit protection, high precision, and robust stability. This assures you safe, consistent performance in your e-beam lithography and sputtering applications.
