High voltage solutions for electrostatic chucks

Speed, high reliability and functionality for semiconductor applications

Electrostatic chucks are vital for semiconductor manufacturing as they enhance the control of the wafer and help in optimizing performance of the tool. A reliable high voltage power supply for your electrostatic chuck is key to preventing equipment failures that cause downtime and loss of revenue.

Contact us

Responding quickly to your power requirements

Reliable and consistent power solutions

Designers expect repeatability and reliability from their high voltage power solution. They also need greater functionality in a compact form due to space constraints in existing fabs.

We have standard off-the-shelf solutions and custom capabilities to help you hit your deadlines. Our power supplies also feature analog and digital monitors and controls that collect data to help manufacturers optimize the performance of the application.

Reliable products for electrostatic chuck applications

ESC Series

Output voltages up to 15kVDC

Single & dual output models

Output current range: 100μA – 10mA

Auto-polarity reverse


Built-in RF filtering available

HRL30 Series

+24VDC input (22 to 30V)

Output voltage & current regulated

0 to 100% programmable output & current

Operating temperature: -40°C to +70°C

On-board +5V reference

Efficiency > 80%

Custom power

Flexible mechanical packages and options

Filter design to meet noise and ripple standards

Multiple digital control options

Reversible polarity

In-house software/firmware development 

I2C, RS232/422/485, DeviceNet and EtherCA