High voltage solutions for electrostatic chucks
Speed, high reliability and functionality for semiconductor applications
Electrostatic chucks are vital for semiconductor manufacturing as they enhance the control of the wafer and help in optimizing performance of the tool. A reliable high voltage power supply for your electrostatic chuck is key to preventing equipment failures that cause downtime and loss of revenue.
Responding quickly to your power requirements
Reliable and consistent power solutions
Designers expect repeatability and reliability from their high voltage power solution. They also need greater functionality in a compact form due to space constraints in existing fabs.
We have standard off-the-shelf solutions and custom capabilities to help you hit your deadlines. Our power supplies also feature analog and digital monitors and controls that collect data to help manufacturers optimize the performance of the application.
Reliable products for electrostatic chuck applications
Output voltages up to 15kVDC
Single & dual output models
Output current range: 100μA – 10mA
Built-in RF filtering available
+24VDC input (22 to 30V)
Output voltage & current regulated
0 to 100% programmable output & current
Operating temperature: -40°C to +70°C
On-board +5V reference
Efficiency > 80%
Flexible mechanical packages and options
Filter design to meet noise and ripple standards
Multiple digital control options
In-house software/firmware development
I2C, RS232/422/485, DeviceNet and EtherCA