Trusted reliable multi frequency, matching network & synthesizer RF power systems with patented stability technologies

Our Radio Frequency (RF) power delivery solutions are utilised in applications from semiconductor fabrication, induction & dielectric heating through to industrial lasers, ultrasonic welding & surface modification. Our wide range of RF power supplies, or generators, combined with our expertise in impedance matching networks for optimum process performance provides a complete RF solution for end equipment applications.

Our RF power delivery solutions range from 100W to 80kW with frequencies from 20kHz to 60MHz, tailored to the end equipment or process from our wide range of standard off the shelf generator and impedance matching network designs.

Experienced in a vast range of applications with complex loads, from plasma generation for deposition or etch in semiconductor fabrication to a range processes in healthcare and industrial applications, our solutions include fixed and frequency agile generators, pulse mode operation generators and auto-tuning, multi-tapped & fixed impedance matching networks. At XP Power we are solutions oriented supporting your system development needs with our specialist applications and engineering knowledge in Radio Frequency applications.

Our product portfolio includes high frequency (2MHz to 60MHz) generators from 600W to 80kW, low frequency (20kHz to 2MHz) generators from 3kW to 10kW, dual frequency (20kHz to 60MHz) generators with 500W to 1500W per output and auto tuning, multi-tap selectable and fixed impedance matching networks up to 60MHz to cover broad spectrum of system & process needs including pulse mode and frequency agile requirements.

Communications solutions include, analog interfaces, digital interfaces, DeviceNet and EtherCAT implementations to suit individual system needs and industry requirements

RF Power Supply Products

High Frequency RF Power Supplies

Our High Frequency RF Power Supplies are designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, ICP, RF sputtering, PECVD, and solar photovoltaic applications. Additional applications include induction and dielectric heating processes in industrial systems.

CB Series

CB series

The CB series is the culmination of 45 years of RF plasma and heating experience. We have taken the proven rugged design of the CX series power amplifier section and combined it with all the innovation in DC supplies and diagnostics to make a compact, stable RF power supply without compromising reliability for size. These single frequency RF power supplies operate in the HF band (3.39MHz to 30MHz) still benefiting from XP Comdel’s “S” technology.

Performance
RF generators from the CB product family are available in power ranges from 50 to 5000 Watts with standard fixed frequencies from 13.56 MHz to 60 MHz. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CB series is based on XP Comdel's proven RF amplifier technology.

Features

  • Small, lightweight packaging
  • Standard fixed frequencies: 3.39 MHz to 30 MHz
  • Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations.
  • Designed to meet ETL and SEMI F47 directives
  • Forward or Delivered power mode regulation

Applications
The CB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, ICP, RF sputtering and PECVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.

Technical Notes

Download Learn about Frequency Agile Tuning for High Performance RF Plasma Systems
Download Learn about XP Comdel's Patented "S" Technology

Low Frequency RF Power Supplies

Our Low Frequency RF Power Supplies are designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, ICP, RF sputtering, PECVD, and solar photovoltaic applications. Additional applications include induction and dielectric heating processes in industrial systems.

CLB Series

CLB series

The CLB series incorporates all of the features and innovations developed in the previous CLF series with the added advantage of lighter weight and smaller size.

Performance
RF generators from the CLB product family are available in power ranges from 2500 to 12,000 Watts at a single frequency in the 20 kHz to 2 MHz band. The Turbotune Technology within the unit allows frequency tuning by automatically varying its output frequency +/-10% around its nominal frequency. The solid-state design provides precise and repeatable power control, ultra-stable output and low cost of ownership. The design of the CLB series is based on XP Comdel's proven RF amplifier technology.

Features

  • Small, lightweight packaging
  • Standard power ranges: 1250, 3000 Watts
  • Any single frequency from 20 kHz to 2 MHz, varying +/-10%
  • Phase lock tuning or software algorithm
  • Designed to meet ETL and SEMI F47 directives
  • Forward or Delivered power mode regulation

Applications
The CLB series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.

Dual Frequency RF Generators & Power Supplies

CDX series

  • Simplify Operations and Reduce Costs Without Sacrificing Performance
  • Compact packaging reduces space, service (electrical and plumbing), and spare inventory requirements.

Performance
The CDX dual frequency RF generator is offered in a design up to a 3000 watts. The high frequency (HF) section of the CDX provides up to 1500 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section can deliver 1500 watts, with optional fixed or variable frequencies ranging from 20 kHz to our new 13.56 MHz. It can be configured as two LF sections or two HF sections or one HF and one LF section.

Features

  • Complies to CE-Mark standards and is ETL Marked and SEMI F47 compliant
  • Protection circuits safeguard the amplifiers from over-voltage, over-current and over-power operating conditions
  • Gain-control circuitry stabilizes output power against line and load variations, and limits power during high VSWR conditions
  • Unique power monitoring in the low-frequency section measures delivered power into any impedance load
  • Optional fast frequency tuning available in the low- frequency section eliminates the need for a matching network in many applications

Applications
Applications include etch, ICP, RF sputtering, PECVD, and solar photovoltaic applications. Additional applications include induction and dielectric heating processes in industrial systems

Impedance Matching Networks

CPM series

  • Ultra-Fast Tuning and Fine Tune Resolution Deliver Repeatable Process Results

Performance
All Match Pro impedence matching networks are engineered with XP Comdel's unique PROTRAK, a high-speed tuning algorithm that gradually slows the system as it approaches the tuning point, allowing a precise match even in high "Q" loads. This proportional control circuitry illustrates the critical difference between XP Comdel's Match Pro and other matching networks. The Match Pro adjusts input impedance to 50 Ohms quickly, accurately and dependably—in response to the changes in load characteristics during your process. The Match Pro operates over a power range from 50 to 50,000 Watts.

Features

  • Automatic and manual modes with local and remote manual control of tuning capacitors
  • Ability to pre-position capacitors to optimal plasma ignition point prior to turn on, resulting in quick and reliable tuning
  • Capacitor position outputs to show where the match occurs from process to process
  • High power, H-bridge, Mosfet motor drive circuitry is conservatively rated for improved reliability
  • Optional BLDC motors and drive for improved motor life cycle
  • Optional DC Bias and RF VP-P detector circuits available

Industries

Our comprehensive portfolio of RF power solutions serve as critical components in a variety of manufacturing applications by providing the higher power and frequencies required in today’s precise processes.

  • Precise RF control to monitor and control any measurable process variable including: delivered power, DC bias voltage, RF current, etc.
  • Instantaneous response to fluctuating power demands
  • Fast pulsing and frequency shifting
  • High quality, stable proven power
  • Etching
  • Deposition
  • LED Processing
  • Silicon Refining
  • Solar Thin Film
  • 20KHz to 100 MHz in solid state up to 10KW

Ultrasonics and Megasonics


Our comprehensive portfolio of RF power solutions serve as critical components in a variety of manufacturing applications by providing:

  • Precise RF control regulated on any measurable process variable including: temperature, frequency, voltage, current, etc.
  • Rapid response to fluctuating power demands
  • Flexibility to adapt to cutting-edge manufacturing practices
  • Ability to retrofit into older production methods
  • High quality, stable and repeatable power
  • High frequency power supplies up to 2MHz
XP Comdel has provided RF power supplies for plasma torch and plasma discharge from 200W to 80KW for production of nanoparticles, ceramic deposition and atomic layer deposition (ALD).

Our comprehensive portfolio of RF power solutions serve as critical components in a variety of manufacturing applications by providing:

  • Precise RF control regulated on any measurable process variable including: temperature, frequency, voltage, current, etc.
  • Rapid response to fluctuating power demands
  • Flexibility to adapt to cutting-edge manufacturing practices
  • Ability to retrofit into older production methods
  • High quality, stable and repeatable power

Our comprehensive portfolio of RF power solutions serve as critical components in a variety of manufacturing applications by providing:

  • Precise RF control regulated on any measurable process variable including: temperature, frequency, voltage, current, etc.
  • Rapid response to fluctuating power demands
  • Flexibility to adapt to cutting-edge manufacturing practices
  • Ability to retrofit into older production methods
  • High quality, stable and repeatable power
  • Frequency tuning available to rapidly tune to changing load.

Metal Hardening and Tempering


The induction hardening and tempering processes lowers costs, increases production, enhances quality control and improves the environment of the workplace. Since heat is generated within the component, the heat is confined to selected area and allows control of heated depth, time, power and temperature. The process is energy efficient, repeatable and easily fits into existing product lines.

XP Comdel offers a wide range of power supplies from 20KHz to 80MHz, and 200W to 80KW.

The loads of dielectric heating processes require optimized RF power levels with on-demand frequency and accurate power control for improved process control.

Our comprehensive portfolio of RF power solutions serve as critical components in a variety of manufacturing applications by providing:

  • Precise RF control regulated on any measurable process variable including: temperature, frequency, voltage, current, etc.
  • Rapid response to fluctuating power demands
  • Flexibility to adapt to cutting-edge manufacturing practices
  • Ability to retrofit into older production methods
  • High quality, stable and repeatable power
  • Frequency Tuning available to rapidly tune to changing loads
  • Arc Shutdown to prevent tooling and product damage

Baking


RF heating is used with conventional baking ovens to remove the final moisture of partially dried bakery products, such as breakfast cereals, crackers, biscuits and sponge cake, as well as to increase the production capacity of existing baking ovens. Bakers use RF to better control the final moisture content of their products, to reduce checking problems, to increase productivity and to improve product quality.


Cooking


Radio frequency (RF) cooking is a form of dielectric heating in which products are heated by subjecting them to an alternatingelectromagnetic field between two parallel electrodes. Although similar in some respects to Microwave heating, RF technology has been proposed to be more suitable for industrial heating of meats because of the greater uniformity of heating, the greater penetration depths it achieves and the decreased need for shielding.


Drying


High frequency drying is an efficient process for the removal of moisture from textiles, lumber and plywood. It is also used in the wood industry for embossing, forming or laminating to fiberboard for OSB and chip board curing and for curing glue to accelerate drying time.


Lamination


Glass Lamination
Radio-frequency dielectric heating to directly heat the polymer interlayers that are used to laminate glass for automotive windshields, hurricane e glass, safety glass, solar panels, and transparent armor. The direct heating virtually eliminates provides an energy savings of 90% over other methods.

Wood Lamination
XP Comdel offers precise power control in a wide range of frequencies.

Our comprehensive portfolio of RF power solutions serve as critical components in a variety of manufacturing applications by providing:

  • Precise RF control regulated on any measurable process variable including: temperature, frequency, voltage, current, etc.
  • Rapid response to fluctuating power demands
  • Flexibility to adapt to cutting-edge manufacturing practices
  • Ability to retrofit into older production methods
  • High quality, stable and repeatable power

Case Study


Customized XP Comdel RF Products Accelerate Time-to-Market and Assure Production Quality


Situation
An international semiconductor chip manufacturer was developing two new PECVD systems and it was essential that they acquire customized RF Power supplies quickly, as they were operating under a very tight deadline.


Challenge
The company had two critical projects that required fast delivery of high performance power sources. XP Comdel’s global support team did an on-site evaluation and, working with American-based XP Comdel engineers, customized existing products in a timely manner. The first project was a new PECVD system, 300 MM, dual chamber cluster tool used for semiconductor device manufacturing. Designed from concept to hardware by the company’s president, this PECVD cluster tool (1-3 twin chambers) required radio frequencies (RF) of 13.56 MHz and 350-450 KHZ. The second project was for a PECVD single chamber tool with an RF requirement of 13.56 MHz and 350-450 KHz.


XP Comdel Approach
It was critical to meet launch deadline for the 300 mm PECVD systems, so XP Comdel recommended their CX2500/CLX1000 RF generator and CPMX-2500/FMN8-5 MATCHPRO matching network designed to maximize the power transfer to a wide range of load impedances. A standard XP Comdel CPMX-2500 HF impendence matching network was ideal for the 13.56 MHz and required no modification or calibration in the field. XP Comdel supported all development of the RF equipment, providing dual RF frequencies and matching networks with RF filtering.


XP Comdel modified existing RFG supporting custom interface with both analog and Device Net communications, customized RF filter, and customized RF matching. Factory engineering supported the field team step-by-step during the development phase.


For the second project, a single chamber PECVD, XP Comdel supplied its CDX2000 RF generator and CPMX2500, and anLMN8-5 matching network. No standard LF matching network was commercially available for this application. XP Comdel created a test plan and provided new LF equipment for engineers at XP Comdel China who were previously given access to the chamber and were able to obtain preliminary impedance data. This allowed the new equipment to be optimally designed for the application.


Results


XP Comdel’s approach to creating customized RF products from existing standards reduces risks and ensures reduced time to market, and minimizes product costs. This flexible approach helped the customer meet their deadline, reduce costs related to their RF requirements, and obtain custom RF match using XP Comdel products for both frequencies. The XP Comdel international field team provided local support with RF testing and diagnostics XP Comdel U.S. factory engineers customized the products to specifically meet this customer’s equipment requirements.


Industry


Semiconductor

Semiconductor Device Manufacturing, Thin Film Equipment

"Because we were able to start with XP Comdel from the beginning, the end results provided use of standard RF products with unique customization at minimal cost and risk to both parties – a win-win for all."
- Vice President of Engineering


Results


  • Increased productivity and throughput
  • Improved quality of thin film
  • Eliminated downtime
  • Met production deadlines

XP Comdel Products Used for this Solution


CDX2000 Dual Frequency RF Generator The CDX dual frequency RF generator comes in a 1200 or 2000 watt design. The high frequency (HF) section of the CDX provides 600 or 1000 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section can deliver 600 or 1000 watts, with optional fixed or variable frequencies ranging from 20 kHz up to 60 MHz.


CLX1000 Low Frequency RF Generator The CLX series low frequency RF power supplies are available in power ranges from 600 to 12,000 Watts with fixed frequencies from 20 kHz to 2 MHz, and frequency agile capability up to 10% bandwidth. The solid-state design provides low cost of ownership with high reliability.


CX2500 High Frequency RF Power Supply The CX2500 features fixed frequencies from 2 MHz to 30 MHz, and frequency agile capability up to 10% bandwidth around a center frequency. The solid-state design provides low cost of ownership with high reliability.


CPMX2500 Match Pro Impedance Matching Network Every Match Pro system is engineered with XP Comdel’s unique PROTRAK, a high-speed tuning algorithm that gradually slows the system as it approaches the tuning point, allowing a precise match even in high “Q” loads. This proportional control circuitry illustrates the critical difference between XP Comdel’s Match Pro and other matching networks. The Match Pro adjusts input impedance to 50 Ohms quickly, accurately and dependably--in response to the changes in load characteristics during your process.


The Match Pro series of matching networks are manufactured at power levels ranging from 25 to 80,000 watts.


Induction Heating Improves Metal Parts Production


Situation
A global manufacturer and marketer of replacement parts, equipment, and accessories for the forestry industries produces high-performance parts using induction heating, a non-contact process that uses high frequency electricity to heat materials that are electrically conductive. Induction heating provides a competitive advantage to the manufacturer with case hardening of bearing surfaces for maximum performance and durability.


Challenge
While the company had been manufacturing small equipment parts using induction heating vacuum tube-based oscillators, they knew their systems were obsolete and needed to be upgraded to improve efficiency, throughput and reliability. They wanted to upgrade or replace 15KW, 1Mhz, induction heating oscillators and improve their rate of throughput to 10 units per second. In addition, they were interested in reducing their overall carbon footprint and manufacturing costs. The company’s manufacturing engineer contacted XP Comdel to discuss new specifications for replacing their oscillators with more efficient, reliable equipment for small parts production.


XP Comdel Approach
The engineering team at XP Comdel has always prided themselves on being able to solve a customer’s specific application needs by designing customized RF generators optimized for performance and reliability. After meeting with the company’s manufacturing engineers, XP Comdel engineers quickly realized that the company’s induction heating method used low frequencies designed to heat large parts; however these frequencies are inefficient when used to heat small parts. Therefore, the oscillators were much larger than necessary, contributing to higher energy consumption, slower throughput and higher costs. XP Comdel’s engineers determined that raising the frequency to 3.39 MHz fixed frequency and employing a customized impedance matching network, production could be accomplished with only 10 KW – a 50% reduction from the process the company previously had been using.


Results


XP Comdel was able to work with the company’s engineering team to replace 15 KW vacuum tube based oscillators with 10 KW solid state RF generators to heat and produce small parts faster, with more precise temperature control, resulting overall higher throughput. Power consumption was reduced by 50%, achieving the company’s environmental goals for a smaller footprint and reducing production costs. Equipment reliability was significantly improved reducing downtime and repairs.


Industry


Induction heating

Industrial Manufacturing



Application


Industrial Heating/Metal Hardening



"XP Comdel has given us full support in the introduction of RF power generators for heat treating parts... They helped us in specification and development, and fixed any electrical issues that we encountered in production. We will always use XP Comdel products to help us in heat treating our manufacturing parts."
- Manufacturing Engineer


Results


  • 50% Reduction in power consumption
  • Increased production efficiency
  • Lowered costs
  • Improved reliability

XP Comdel Products Used for this Solution


CX High Frequency RF Power Supplies
The CX high frequency series is available in power ranges of 5000 and 10,000 Watts with fixed frequencies from 2 to 30 MHz, and frequency agile capability up to 10% bandwidth. The CX series provides precise, repeatable power control with ultra-stable output. The solid-state design provides low cost of ownership with high reliability.


Frequently Asked Questions



A: S-Technology is a patented, unique amplifier design that makes the gain of the power amplifiers in XP Comdel "S" generators constant rather than dependent upon load conditions. As plasma impedance changes, especially the large change that occurs at the instant of plasma ignition, non "S" generators may display erratic power gain characteristics that result in amplitude modulation of the RF envelope. This modulation can cause matching networks to malfunction completely or, more subtly, can shorten matching network life. This is the reason that XP Comdel does not supply matching networks to be used with non "S" generators.


A: 13.56 MHz is one of several I.S.M. frequencies mandated by the FCC. These are frequencies set aside for industrial, scientific, and medical purposes and have relaxed emissions limitations because they are so positioned in the radio wave spectrum as to not interfere with safety, emergency, and military communications. It just happens that this particular ISM frequency has the most plasma research historical data.


A: A linear amplifier is one in which the output current is directly proportional to the voltage input. Linear amplifiers do not distort the signal or cause hamonics to be introduced. A class A amplifier is an example of a linear amplifier. A nonlinear amplifier is one that does not operate over the linear operating region of the transistor or tube. Instead, the device is used primarily as a switch to turn the current off and on. Nonlinear amplifiers generate pulses or square waves at the frequency of operation.


A: This generally means that the generator is in "reflected foldback." The generator is limiting its forward power output to protect itself against excessive reflected power. For XP Comdel generators, this foldback occurs when the reflected power reaches about 20% of the full rated power of the generator. This condition is seldom the fault of the RF generator. The problem might lie in the coax, the matching network, or a short of open in the RF chain after the match. In plasma applications, any condition that prevents the striking of plasma will result in high reflected power.


A: Under these conditions, some energy is being delivered to the load, but the impedance matching mechanism of the system is not able to match the load well enough. If the generator is fixed frequency, then the fault lies elsewhere. If the generator adjusts its frequency to accomplish impedance matching, then this may be suspect, but so might the impedance matching network that works with the generator. Other causes include chamber conditions resulting in plasma impedance outside the range of the matching network.


A: This means the safety interlock loop is not satisfied. Internal to the generator there are cover interlocks and an interlock switch associated with the RF output(s) that is actuated by the cover that goes over the coax cable connection. In addition to these there, are two pins on the external interface that must be connected together in order to satisfy the interlock chain. Typically these two pins are connected together using switches on associated external parts, such as the matching network cover or plasma chamber.


A: First, check to see if breaker on the back of the generator is on (circuit breaker should be in the up position). Next, verify that there is AC power to the generator (verify AC power with a voltage meter). If these conditions have been verified and there are still no lights lit and no display present, the generator will need to be replaced.


Equipment for Troubleshooting:



To properly test your supply, you need a standard portable digital multimeter (DMM),a power-SWR meter, and a dummy load.

Multimeter: It measures AC/DC voltages, amperage, and ohm resistance of pots and pickups. It is used to measure line voltage and, when set as an ohm meter, it can be used to check the coax cable.

Power-SWR Meter: Our generators have built-in power meters that show forward and reverse power, but for setting up and testing power supplies, an external meter is useful.

Dummy Load: Dummy loads are necessary for troubleshooting the generator at medium and high power levels. Commercial dummy loads are available with a 50-ohm resistive, noninductive impedance, with power levels ranging from a few hundred to many thousands of watts. The dummy load is usually connected to the output of the RF generator with a short 50-ohm coaxial cable and allows you to put maximum power into a standard load while making tests on the generator. When testing RF generators using impedance-matching networks, a dummy load that more accurately represents the load in the system is highly desirable.

Additional equipment:

Oscilloscope: This is used to observe the signals from the crystal oscillator through the various driver, buffer, and power amplifier stages. The scope will show any signal distortion, noise, or other characteristics that cannot be detected with a voltmeter.

Frequency Counter: The primary use of this piece of equipment is to check the operational frequency of the RF generator and to verify that the crystal oscillator is on frequency. RF generators are regulated by the FCC and must operate on specific frequencies within a given tolerance range. If the actual frequency deviates too much, adjustments may be necessary. Frequency adjustments are madeonly after the equipment has warmed up for at least an hour—it’s important that the generator be at a stable normal temperature before adjusting the frequency.

Spectrum Analyzer: This Oscilloscope-like equipment is useful in diagnosing unusual troubles in a generator that may be related to distortion and harmonics or spurious signals. Most spectrum analyzers are used in RF communications systems where they can show the sidebands developed during modulation as well as harmonic distortion and for detecting and isolating interference.

RFI-EMI Tester: This test equipment is a highly sensitive radio receiver designed to detect stray RF radiation, including harmonics and intermodulation products. The more sophisticated test sets incorporate a spectrum analyzer. Field Strength Meter: This is a simple radio receiver used to measure the amount of signal radiated from an RF source.

Troubleshooting Safety Tips:

  1. Remove all jewelry before working on RF generators and related equipment. Metal jewelry can cause serious harm or even death when you are working on high-voltage RF equipment.
  2. To minimize accidentally touching a voltage source when working inside the equipment on power supplies or high-voltage connections, use only one hand and keep your other hand in your pocket.
  3. Do not disable any equipment interlocks. With power removed, you can usually troubleshoot in safety. The low voltage (24 V) safety interlock circuit is designed to disable the unit in the event of an interlock fault condition. Low voltage power for the interlock circuit is supplied by a step down transformer located inside the unit. This transformer is designed to provide safe low- voltage operation and provide isolation from the main AC line.
  4. To avoid an accidental shock, keep your clothes and work area free of water or moisture.
  5. To prevent electrical shock and/or RF burns, never operate equipment with the covers removed. Never operate without an appropriate cable connected between the RF output connector on the rear panel and the load.
  6. Equipment must be bonded to Protective Earth (safety ground) prior to operating the unit. Safety ground connection must be made at the unit’s rear panel designated 1/4"- 20 threaded ground stud. The ground wire should be a #14 awg or equivalent (minimum) green/yellow lead.
  7. Prior to performing system maintenance, repair or other service operations, the generator must be locked out and tagged out to prevent accidentally energizing the system. First disconnect AC input power to the generator, then mount a suitable “Clamshell” type lockout device to the AC input plug such as a Hubbell # HLD2 or equivalent. Follow all manufacturers’ directions for the lockout device.

Troubleshooting First Steps:

WARNING: Equipment must be installed, operated and serviced only by trained, qualified persons.

CAUTION: Breaking the seal or removing the warranty decal from any unit will void the warranty. If internal damage is suspected, contact factory for assistance.

  1. If a problem with the generator has been identified, verify it by attempting to duplicate the problem.
  2. Inspect cables and connectors.
  3. Check for the correct settings of front panel controls, observe any meter readings or display readouts, and re-enter commands from equipment connected to a personal computer or terminal. For instance, equal forward power and reflected power might indicate an open coax cable between the generator and matching unit, or a bad matching unit.
  4. One of the most obvious problems is simply lack of power to the equipment. Check circuit breakers and reset, if necessary. Verify that there are no bad fuses. If a fuse was blown, replace it with one of the same value and type. Then recheck the equipment.
  5. If the system is still malfunctioning, in most cases, the next step should be to replace the generator with a functioning spare to get the system back in operation.

If your equipment is still under warranty, the best course at this point is to request an RMA number and return the unit to the factory, or you can visit our contact us page for your nearest sales office.

Resources

http://www.rfcafe.com/

For anyone looking for additional information on RF technology, the RF Cafe is a terrific resource. The site is informative, full of links to other useful engineering resources and, most importantly, it's fun!

http://www.semi.org

A handful of visionary leaders created a forum for semiconductor equipment and materials suppliers. The resulting organization is now known as SEMI.

http://www.semi-directory.com/rf-power-supplies/comdel/k1049-106

Semi-Directory, the approved supplier guide for SEMI®, is the most comprehensive semiconductor directory available, providing supplier and industry resources to semiconductor industry professionals. We've bookmarked our listing of course, but feel free to look around if you haven't visited already.

http://www.sematech.org/index.htm

Headquartered in Austin, Texas, SEMATECH is a global consortium of leading semiconductor manufacturers that represents about half the world's semiconductor production.

http://www.svc.org/

Headquartered in Austin, Texas, SEMATECH is a global consortium of leading semiconductor manufacturers that represents about half the world's semiconductor production.

http://www.seia.org/

The national trade association of the solar energy industry, the SEIA works to expand the use of solar technologies and strengthen research and development for solar energy. The SEIA Solar Directory provides a great resource of equipment and materials suppliers to solar industry professionals.

http://www.fcc.gov/oet/rfsafety/

This is the official site of the FCC. We have bookmarked the page on RF Safety.

http://www.access.gpo.gov/nara/cfr/waisidx_00/47cfr18_00.html

For those interested in FCC regulations governing industrial, scientific, and medical equipment.