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CB3000 Series

When process reliability is a must, the CB3000 RF generator features our semiconductor production proven solid-state design to provide precise and repeatable power control, delivering ultra-stable and reliable RF power for your most mission-critical processes.

Features

  • 3000 Watts

  • Small, lightweight packaging

  • Frequencies from 13.56 MHz to 60 MHz

  • Designed to meet ETL and SEMI F47 directives

  • LF class D\HF Class C or D amplifiers

  • Regulated Switch-mode DC Section

Image Model Name Power Input Voltage Frequency Datasheet RFQ
CB3000 CB3000 3kW 208 / 400 / 480 VAC (3-Phase) 13.56 to 60MHz Datasheet RFQ
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