CDX Series

The CDX series is the industry-leading dual RF plasma generator. This unique design is the culmination of more than 40 years of XP RF amplifier engineering knowledge, integrating two different RF outputs into one single, compact, high-performance package. 

When it comes to serviceability and integration, the CDX generator is the most cost-effective and flexible RF solution, designed to meet future market requirements.



  • Available 400kHz, 2MHz, 13.56MHz, 27.12MHz, 40.68MHz, or 60MHz choose any two.
  • Regulated switch-mode DC section
  • Up to 1.5kW per output - water cooled
  • Class C amplifier & class D amplifier (all FED or LDMOS)
  • 3U 19” rack mount
  • DeviceNet, EtherCAT, RS232
Image Model Name Power Input Voltage Frequency Datasheet RFQ
CDX 1.5kW 208 / 400 / 480 VAC (3-Phase) 0.4 to 60MHz (Dual) Datasheet RFQ
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