CB600A Series

When process reliability is a must, the CB600A RF generator features our semiconductor production proven solid-state design to provide precise and repeatable power control, delivering ultra-stable and reliable RF power for your most mission-critical processes.



  • 600 Watts
  • Available in six standard frequencies
  • Small, lightweight packaging
  • Standard power: up to 600W
  • Frequencies from 400kHz to 60MHz
  • Meets EN610110 and SEMI F47 directives
  • LF class D\HF class C or D amplifiers
  • Regulated switch-mode DC section
Image Model Name Power Input Voltage Frequency Datasheet RFQ
CB600A 600W 208VAC (1-Phase) 0.4 to 60MHz Datasheet RFQ
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