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CB600A Series
When process reliability is a must, the CB600A RF generator features our semiconductor production proven solid-state design to provide precise and repeatable power control, delivering ultra-stable and reliable RF power for your most mission-critical processes.
Features
600 Watts
Available in six standard frequencies
Small, lightweight packaging
Standard power: up to 600W
Frequencies from 400kHz to 60MHz
Meets EN610110 and SEMI F47 directives
LF class D\HF class C or D amplifiers
Regulated switch-mode DC section