CB600A Series
When process reliability is a must, the CB600A RF generator features our semiconductor production proven solid-state design to provide precise and repeatable power control, delivering ultra-stable and reliable RF power for your most mission-critical processes.
Features
- 600 Watts
- Available in six standard frequencies
- Small, lightweight packaging
- Standard power: up to 600W
- Frequencies from 400kHz to 60MHz
- Meets EN610110 and SEMI F47 directives
- LF class D\HF class C or D amplifiers
- Regulated switch-mode DC section
Environmental Compliance
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